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US 6,293,698 B1Granted
Method for precise temperature sensing and control of semiconductor structures
AssigneeAdvanced Micro Devices, Inc.
InventorRoger L. Alvis
Life of this patent
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Abstract
Precise sensing and controlling of temperature during in-situ testing of a structure used in an integrated circuit by fabricating or placing a heat source element adjacent to the structure and by fabricating or placing a temperature sensing element adjacent to the structure.
Claims7
A method for precisely sensing and controlling the temperature during testing of a structure used in an integrated circuit, comprising the steps of:
- providing a structure to be tested;
- placing at least one thermal element adjacent to a first portion of said structure to be tested;
- placing at least one sensing element adjacent to the first portion of said structure to be tested;
- encapsulating said structure, said at least one thermal element, and said at least one sensing element in a dielectric material;
- and
- heating said first portion of said structure to be tested with said at least one thermal element.
3 more elements
Dependencies are inferred from the claim text.