US 6,293,306 B1 · Throttle gate valve

Abstract

A throttle gate valve (10) including an upright, generally rectangular valve housing (12), in which is positioned a linearly movable gate valve (32) for closing off a thru-opening (15) formed in the lower part of housing (12). A pneumatic actuator assembly (14) is provided for moving the gate valve between its opened and closed positions. A throttle vane assembly compartment (16) forms the lower side of valve housing (12) and frames thru-opening (15), and includes a set of throttle vanes (18) rotatably positioned within thru-opening (15), and a drive actuator compartment (20) and motor (21) for controlling the position of throttle vanes (18). A drive actuator (51) is provided for rotating vanes (18) and is sealed by a bellows shield (70) at the point where the drive actuator extends into the interior of the housing.

Claims22

Dependent claims

A throttle gate valve, comprising

a housing defining a thru-opening for controlling vacuum within a process chamber,
a gate valve movable between open and closed positions, in the closed position closing off the thru-opening to prevent the passage of process gases,
a linear conductance throttle vane movably mounted within the thru-opening for throttling flow of gases through the thru-opening when the gate valve is in its open position, and
a drive mechanism for moving the throttle vane in order to vary flow of the process gases, the drive mechanism including a linear drive actuator extending into the housing and including a bellows shield to prevent escape of gases where the linear drive actuator extends into the housing.

1 more element

Dependencies are inferred from the claim text.

Throttle gate valve

Life of this patent

Throttle gate valve

Life of this patent

Abstract

Claims22