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US 6,293,154 B1Granted
Vibration compensated pressure sensing assembly
AssigneeKulite Semiconductor Products, Inc.
InventorAnthony D. Kurtz
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AssigneeKulite Semiconductor Products, Inc.
InventorAnthony D. Kurtz
Estimating the term…
A pressure sensing device for producing an output proportional to an applied pressure irrespective of vibration and acceleration of the device, the device including: a first deflecting diaphragm formed in a first wafer and including a first plurality of piezoresistors mounted thereon, the first diaphragm being responsive to the applied pressure and vibration of the device; and, a second deflecting diaphragm formed in the first wafer and including a second plurality of piezoresistors mounted thereon, the second diaphragm being responsive only to vibration of the device; wherein, the first and second pluralities of piezoresistors are electrically coupled together to provide a common output such that they cooperatively at least partially cancel a portion of the common output associated with the vibration of the device.
A pressure sensing device for producing an output proportional to an applied pressure irrespective of vibration and acceleration of said device, said device comprising:
A pressure sensing assembly comprising:
A method for eliminating an undesirable component in an output of a pressure sensing device resulting from vibration or acceleration of said device, said device comprising a plurality of deflectable diaphragms each having a piezoresistive network mounted thereon and being operable to provide a signal indicative of an amount of deflection of said diaphragm on which it is mounted, said method comprising:
Dependencies are inferred from the claim text.