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US 6,293,109 B1Granted
Pulse pipe refrigerating machine and cryopump using the refrigerating machine
AssigneeDaido Hoxan Inc.
InventorsAtsushi Miyamoto, Yasuhiro Kakimi, Shingo Kunitani, Daisuke Ito
Life of this patent
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Abstract
A pulse tube refrigerator which enables holding a cooling temperature without the use of a heater and the like. The pulse tube refrigerator employs a working gas which has a liquefying temperature within the range of an operating temperature of the pulse tube refrigerator.
Claims5
A pulse tube refrigerator employing a working gas which has a liquefying temperature within the range of an operating temperature of the pulse tube refrigerator.
Dependencies are inferred from the claim text.