Transmission system for synchrotron radiation light

A synchrotron radiation light transmission system, comprising:

• a mirror box formed with an incoming opening and an outgoing opening through which synchrotron radiation light having a horizontally elongated beam cross section passes;
• a mirror disposed in said mirror box for reflecting the synchrotron radiation light;
• a duct coupled to the outgoing opening of said mirror box for defining a hollow space through which the synchrotron radiation light output from the outgoing opening passes;
• and
• a thin film mounted at an output port of said duct for attenuating and transmitting the synchrotron radiation light therethrough, wherein an optical path length in said thin film the synchrotron radiation light transmitting through said thin film is made different in each point in an in-plane of said thin film to change an attenuation amount of the synchrotron radiation light in the in-plane;
• wherein said thin film is formed so that the optical path length in said thin film of the synchrotron radiation light is made longer as said thin film because more distant from an incidence plane of said mirror of an optical center axis of the synchrotron radiation light along a direction vertical to the incidence plane;
• and
• wherein said thin film is curved along a cylindrical surface having a generator to an optical axis of the synchrotron radiation light transmitting through said thin film.

A synchrotron radiation light transmission system, comprising:

• a mirror box formed with an incoming opening and an outgoing opening through which synchrotron radiation light having a horizontally elongated beam cross section passes;
• a mirror disposed in said mirror box for reflecting the synchrotron radiation light;
• a duct coupled to the outgoing opening of said mirror box for defining a hollow space through which the synchrotron radiation light output from the outgoing opening passes;
• a thin film mounted at an output port of said duct for attenuating and transmitting the synchrotron radiation light therethrough, wherein an optical path length in said thin film of the synchrotron radiation light transmitting through said thin film is made different in each point in an in-plane of said thin film to change an attenuation amount of the synchrotron radiation light in the in-plane;
• a mirror swinging mechanism for swinging said mirror up and down an optical center axis of the synchrotron radiation light reflected by said mirror;
• holding means for holding an exposure workpiece at a position where the synchrotron radiation light transmitted through said thin film is applied;
• and
• a duct driving mechanism for moving said duct synchronously with a swing of said mirror so that a point of said think film which the optical center axis of the synchrotron radiation light passes is fixed in the in-plane while said mirror is swung;
• wherein an attenuation amount of the synchrotron radiation light in said thin film is different in each point in the in-plane so that an exposure amount distribution on an exposure plane of the exposure workpiece as said mirror is swung is more uniform than if said thin film were not present;
• and
• wherein a beam cross section of the synchrotron radiation light reflected by said mirror is curved in plane symmetry with a vertical plane including the optical center axis of the synchrotron radiation light, and said thin film has a uniform thickness and a shape defined so that a cross line between said think film and the vertical plane including the optical center axis of the synchrotron radiation light is curved, thereby changing the attenuation amount of the synchrotron radiation light in the horizontal direction.

A synchrotron radiation light transmission system, comprising:

• a mirror box formed with an incoming opening and an outgoing opening through which synchrotron radiation light having a horizontally elongated beam cross section passes;
• a mirror disposed in said mirror box for reflecting the synchrotron radiation light;
• a duct coupled to the outgoing opening of said mirror box for defining a hollow space through which the synchrotron radiation light output from the outgoing opening passes;
• a thin film mounted at an output port of said duct for attenuating and transmitting the synchrotron radiation light therethrough, wherein an optical path length in said thin film of the synchrotron radiation light transmitting through said thin film is made different in each point in an in-plane of said thin film to change an attenuation amount of the synchrotron radiation light in the in-plane;
• a mirror swinging mechanism for swinging said mirror up and down an optical center axis of the synchrotron radiation light reflected by said mirror;
• holding means for holding an exposure workpiece at a position where the synchrotron radiation light transmitted through said thin film is applied;
• and
• a duct driving mechanism for moving said duct synchronously with a swing of said mirror so that a point of said thin film which the optical center axis of the synchrotron radiation light passes is fixed in the in-plane while said mirror is swung.