US 6,285,059 B1Granted

Structure for laterally diffused metal-oxide semiconductor

AssigneeUnited Microelectronics Corp.

InventorMing-Tsung Tung

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Abstract

A structure for forming a laterally diffused metal-oxide semiconductor is disclosed. The structure will include the following portions. They are a semiconductor layer with a conductivity type, a field insulating region into the semiconductor layer, a gate electrode formed over at least a portion of a channel region and insulated therefrom. The first drain region without an oxide top surface is formed beside one side of the gate electrode into the semiconductor layer. A second drain region is formed in the semiconductor layer. Also, a lightly doped portion borders the channel region and the neighbouring field insulating region. The main portion neighbors the oxide top surface and is spaced from the channel region by the lightly doped portion. The main portion has a second doping concentration that is less than the first doping concentration. The deep portion has a third doping concentration that is less than the second doping concentration.

Claims6

Dependent claims

A laterally diffused metal-oxide semiconductor device, comprising:

a gate region formed in a trench of a semiconductor substrate;
a source region adjacent said gate region, said source region being disposed in and contacted from the top of the semiconductor substrate;
a drain region spaced from said source region by said gate region, said drain region being disposed in and contacted from the top of the semiconductor substrate;
a field insulating region disposed between said gate region and said drain region;
a positive well region under and contacting with said source region, said positive well region comprising a first layer and a second layer under said first layer, the doping concentration of said first layer larger than that of said second layer;
a negative well region under and contacting with said drain region, said negative well region comprising a first layer and a second layer under said first layer, the doping concentration of said first layer larger than that of said second layer;
a channel region formed along the sidewalls and bottom of said gate region, said channel region overlapping a portion of said positive well and a portion of said negative well;
and
an oxide region disposed between said gate region and said drain region/source region.

6 more elements

Dependencies are inferred from the claim text.