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US 6,284,675 B1Granted
Method of forming integrated circuit dielectric by evaporating solvent to yield phase separation
AssigneeTexas Instruments Incorporated
InventorsChangming Jin, Joseph D. Luttmer
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Abstract
A phase separation during solvent evaporation of a solution containing polymer precursors leaves low pressure solvent without polymer precursor in minimal gaps. After polymerization, drive off the low pressure solvent to yield air gaps in the minimal gaps under the polymer.
Claims1
A method of dielectric fabrication, comprising the steps of:
- (a) providing a surface with gaps;
- (b) coating said surface with a solution including polymer precursors, a first solvent, and a second solvent, said second solvent with a lower vapor pressure than said first solvent;
- (c) evaporating said first solvent to yield a phase separation with said gaps containing said second solvent without said polymer precursors;
- (d) polymerizing said polymer precursors;
- and
- (e) removing said second solvent from said gaps.
3 more elements
Dependencies are inferred from the claim text.