Integration of bipolar and CMOS devices for sub-0.1 micrometer transistors

A method of forming a semiconductor device on a silicon semiconductor substrate which is doped having a top surface providing an interface on which an epitaxial silicon semiconductor layer that is counterdoped, said epitaxial semiconductor layer having an upper surface, said method comprising the steps as follows:

• forming dielectric, shallow trench isolation structures in the upper-surface separating said substrate into a plug area, an emitter area, an NMOS area and a PMOS, area, said plug area being juxtaposed with said emitter area located on a side of said emitter area away from said NMOS area and said PMOS area,
• then forming a buried doped region proximate to said interface for a bipolar transistor at the bottom of said plug area and at the bottom of said emitter area and in the confronting surface of said substrate deep below said surface of said epitaxial silicon semiconductor layer located straddling said interface and spaced well below said upper surface,
• then forming a collector plug region in said plug area, extending from said upper surface to reach said buried doped layer,
• then forming a gate oxide layer superjacent to said isolation structures on said upper surface,
• forming a conductive polysilicon layer on said gate oxide layer,
• forming a lightly counter doped region in said emitter area below said upper surface,
• masking said NMOS and PMOS areas of said substrate with an emitter mask having a window over said emitter area of said substrate,
• ion implanting emitter dopant into a portion of said conductive polysilicon layer over said emitter area of said substrate through said window in said emitter mask,
• stripping said emitter mask,
• patterning an emitter conductor over said emitter area and CMOS gates over said NMOS and PMOS areas from said conductive polysilicon layer,
• annealing said substrate including said gate oxide layer, and said conductive polysilicon layer to drive said emitter dopant into an emitter region in said emitter area in said epitaxial silicon semiconductor layer, and
• forming doped source/drain regions in said NMOS area and said PMOS area and forming a base region adjacent to said emitter region in said emitter area of said substrate.

A method of forming a semiconductor device on a silicon semiconductor substrate which is P-doped having a top surface providing an interface on which an epitaxial silicon semiconductor layer that is counter N− doped, said epitaxial semiconductor layer having an upper surface, said method comprising the steps as follows:

• forming dielectric, shallow trench isolation (STI) structures filled with silicon oxide dielectric in said epitaxial layer, said STI structures extending downwardly from said upper surface to provide separate areas including a plug area, a emitter area, an NMOS area and a PMOS area, with said plug area being juxtaposed with said emitter area located on a side of said emitter area away from said NMOS area and said PMOS area,
• then forming a buried doped N+ region for a bipolar transistor straddling said interface in both said plug area and said emitter area of said epitaxial layer and deep below said upper surface and in said substrate proximate to said interface and spaced well below said upper surface,
• then forming an N+ collector plug region in said plug area, extending from said surface of said substrate to reach said buried doped layer,
• then forming a gate oxide layer superjacent to said isolation structures on said top surface of said counter-doped epitaxial silicon semiconductor layer having a thickness from about 5 Å to about 40 Å,
• forming a conductive polysilicon layer over said gate oxide layer,
• forming a lightly counter doped region in said emitter area below said surface,
• masking said NMOS and PMOS areas of said substrate with an emitter mask having a window over said emitter area of said substrate,
• ion implanting emitter dopant into a portion of said conductive polysilicon layer over said emitter area of said substrate through said window in said emitter mask,
• stripping said emitter mask,
• patterning an emitter conductor over said emitter area and CMOS gates over said NMOS and PMOS areas from said conductive polysilicon layer,
• annealing said substrate including said gate oxide layer, and said conductive polysilicon layer to drive said emitter dopant into an emitter region in said emitter area in said substrate performed by Rapid Thermal Annealing (RTA), and
• forming doped source/drain regions in said NMOS area and said PMOS area and forming a base region adjacent to said emitter region in said emitter area of said substrate.