Reticle cleaning without damaging pellicle
AssigneeMicron Technology, Inc.
InventorMatthew E. Williams
Life of this patent
Estimating the term…
Abstract
A reticle having a pellicle frame and pellicle membrane is cleaned without removing or damaging the pellicle membrane. A cover encases the pellicle membrane and pellicle frame, sealing the pellicle from the external environment during a cleaning process. The cover fits around the periphery of the pellicle frame and covers the pellicle membrane. An edge of the cover in contact with the reticle forms a seal. The reticle is fastened to reticle supports on a spin chuck during the cleaning process. An anchor plate presses the cover to the reticle, maintaining the pellicle sealed from the external environment. The cover and reticle are sandwiched together between the anchor plate and spin chuck.
Claims24
An apparatus for encasing a pellicle membrane, comprising:
- a reticle including a pattern on a surface thereof;
- a pellicle frame disposed on said surface, outside of a periphery of said pattern, said pellicle membrane being secured to said pellicle frame and spaced apart from said pattern;
- a lid including a recessed area bordered peripherally by a wall, said wall having a height that exceeds a height of said pellicle frame, said lid being configured to receive within said recessed area said pellicle membrane and said pellicle frame upon placement of said lid thereover with an edge of said lid in contact with said surface of said reticle;
- and
- a sealing member positioned adjacent said edge.
A reticle assembly, comprising:
- a reticle including a pattern on a surface thereof;
- a pellicle membrane disposed over and spaced apart from said surface by a pellicle frame disposed outside of a periphery of said pattern;
- a lid disposable over said pellicle membrane and said pellicle frame and including a container region defined by a top thereof and at least one peripheral sidewall extending from said top and including a lower edge;
- and
- a sealing member disposed adjacent said lower edge.
A reticle assembly, comprising:
- a reticle including a surface;
- a pellicle membrane positioned at least partially over said surface and spaced apart therefrom;
- and
- a lid configured to be positioned over said surface so as to sealingly enclose a covered portion of said pellicle membrane.
An apparatus for enclosing a pellicle membrane disposed over at least a portion of a surface of a reticle, comprising:
- a container configured to receive the pellicle membrane;
- and
- a sealing member disposable adjacent a lower edge of said container so as to form a seal between said lower edge and the surface of the reticle.
Dependencies are inferred from the claim text.