Sputtering target free of surface-deformed layers
AssigneeNikko Materials Co., Ltd.
InventorsHideyuki Takahashi, Tateo Ohhashi, Kazuhiro Seki
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Abstract
A sputtering target is provided which provides early stabilization of the film-deposition rate of the sputtering target from its initial stage of use. The sputtering target surface subjected to erosion is formed with a surface-deformed layer. The surface-deformed layer is reduced by precision machining and removed by etching. The extent of etching is controlled so that the surface roughness (Ra) is in a range between 0.1% and 10% of the mean crystal grain diameter of the material constituting the target. The surface roughness (Ra) is defined as the mean roughness on the center line of the surface.
Claims1
A sputtering target comprising a surface subjected to erosion, said surface being substantially free of a surface-deformed layer, made of a metal having a pre-determined mean crystal grain diameter, and having a surface roughness (Ra) defined as a mean roughness on a center line of said surface in a range of between about 1.0% and 10% of said mean crystal grain diameter of said metal, wherein said surface roughness (Ra) is in a range between 0.4 μm and 4 μm.
Dependencies are inferred from the claim text.