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AssigneeKabushiki Kaisha Toshiba
InventorsShusuke Yoshitake, Yoshiaki Tsukumo, Ryoichi Hirano, Toru Tojo, Yoshiaki Tada, Makoto Kanda
Estimating the term…
A method of transferring a sample to and from a treating chamber kept in a vacuum atmosphere through a pressure regulatively preparatory chamber. The sample is contained in the sample transfer container, which is kept air-permeable by a dust filtering filter, in a cleaned atmosphere before the sample is transferred to the treating chamber. The sample transfer container is transferred into the preparatory chamber, and the inside of the preparatory chamber is evacuated to a vacuum atmosphere. The sample is then extracted from the sample transfer container in the vacuum atmosphere and is transferred into the treating chamber. Also disclosed is an apparatus for supporting the sample transferring method.
A charged beam drawing apparatus for drawing a pattern on a sample with a charged beam in a working chamber internally kept in a vacuum state, by placing the sample in a preparatory chamber, by setting the inside of said preparatory chamber in a vacuum state by evacuating the gas out of said preparatory chamber, by opening a partition isolating said preparatory chamber and said working chamber, and by transferring said sample from said preparatory chamber onto a working table in said working chamber, comprising:
A charged beam drawing apparatus for drawing a pattern on a sample with a charged beam by transferring said sample onto a working table in a working chamber,
A charged beam drawing method of drawing a pattern on a sample with a charged beam in a working chamber internally kept in a vacuum state, by placing the sample in a preparatory chamber, by setting the inside of said preparatory chamber in a vacuum state by evacuating the gas out of said preparatory chamber, by opening a partition isolating said preparatory chamber and said working chamber, and by transferring said sample from said preparatory chamber onto a working table in said working chamber,
A charged beam drawing apparatus for drawing a pattern on a sample with a charged beam in a working chamber internally kept in a vacuum state, by placing the sample in a preparatory chamber, by setting the inside of said preparatory chamber in a vacuum state by evacuating the gas out of said preparatory chamber, by opening a partition isolating said preparatory chamber and said working chamber, and by transferring said sample from said preparatory chamber onto a working table in said working chamber,
A charged beam drawing method comprising:
A charged beam drawing method comprising:
Dependencies are inferred from the claim text.