Electrostatic method and apparatus for vaporizing precursors and system for using same

A vapor deposition system comprising:

• an electrostatic spraying device for providing a precursor spray having a first electrical charge;
• a housing defining a vaporization zone, the housing including a heated element therein having a second electrical charge for attracting the precursor spray from the electrostatic spraying device and for vaporization of the precursor spray;
• and
• a process chamber for receiving the vaporized precursor spray from the vaporization zone.

A method of vaporizing precursors for vapor deposition processes, the method comprising the steps of:

• providing electrically charged precursor powder particles;
• attracting the charged powder precursor particles to a heated element having a charge opposite of the charged precursor powder particles;
• and
• vaporizing the charged precursor powder particles with the heated element.

A method of vaporizing precursors for vapor deposition processes, the method comprising the steps of:

• providing electrically charged precursor microdroplets;
• attracting the charged precursor microdroplets to a heated element having a charge opposite of the charged precursor microdroplets;
• and
• vaporizing the charged precursor microdroplets using the heated element.

A method of controlling the vaporization of precursors for vapor deposition processes, the method comprising the steps of:

• using an electrically charged and heated element to attract thereto and to vaporize a precursor spray of opposite charge;
• detecting the concentration of unvaporized precursor spray;
• and
• controlling the vaporization of the precursor spray as a function of the detected concentration.

A vaporizing apparatus for providing a vaporized precursor to a process chamber in a vapor deposition process, the apparatus comprising:

• an electrostatic dispensing device for providing precursor spray having a first electrical charge;
• a pressurizable chamber defining a vaporization zone for receiving the electrically charged precursor spray and a carrier gas;
• and
• a heated element in the vaporization zone having a second electrical charge opposite of the first charge, the heated element for vaporizing the precursor spray attracted thereto, the carrier gas for moving the vaporized precursor spray into the process chamber.