Fluorinated metal having a fluorinated layer and process for its production
AssigneeShowa Denko K.K.
InventorsKunio Kashiwada, Takanori Kodama, Hiroyasu Taguchi, Satoshi Hirano
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Abstract
The known flourinated layer has usually a thickness of from 1000 to 3000 angstroms. After the forced oxidation of metal, the forcibly oxidized surface is flourinated. As a result of the preceding forcing oxidation, a 1 μm or more thick fluorinated layer is formed on the surface of the metal.
Claims61
A fluorinated aluminum article having a fluorinated layer formed by forcibly oxidizing a surface of a monolithic aluminum and thereafter fluorinating the forcibly oxidized surface and having 1 μm or more of fluorinated layer thickness, wherein said fluorinated layer consists of a first layer, which essentially consists of an aluminum fluoride and a second layer of aluminum which underlies the first layer, and into which fluorine is diffused.
A fluorinated metal article, having a fluorinated layer formed by forcibly oxidizing a surface of a monolithic metal which is at least one metal selected from the group consisting of nickel, copper and silver, and thereafter fluorinating the forcibly oxidized surface and having 1 μm or more of fluorinated layer thickness.
A fluorinated aluminum article having a fluorinated layer formed by forcibly oxidizing a surface of an aluminum film formed on a monolithic material and thereafter fluorinating the forcibly oxidized surface and having 1 μm or more of fluorinated layer thickness, wherein said fluorinated layer consists of a first layer, which essentially consists of an aluminum fluoride, and a second layer of said aluminum which underlies the first layer, and into which fluorine is diffused.
A fluorinated aluminum article according 9, wherein said first layer has a thickness of 100 μm or less.
A fluorinated metal article having a fluorinated layer formed by forcibly oxidizing a surface of a metal film which is at least one metal selected from the group consisting of nickel, copper and silver, formed on a monolithic material and thereafter fluorinating the forcibly oxidized surface and having 1 μm or more of fluorinated layer thickness.
A fluorination process of aluminum, comprising the steps of:
- forcibly oxidizing a surface of a monolithic aluminum by an oxidizing material;
- and, bringing said a resulting forcibly oxidized layer into contact with a fluorination gas to form a fluorinated layer having 1 μm or more of thickness, wherein said fluorinated layer consists of a first layer, which essentially consists of an aluminum fluoride and a second layer of aluminum, which underlies the first layer, and into which fluorine is diffused.
A fluorination process of aluminum comprising the steps of:
- forming an aluminum film on a monolithic material;
- forcibly oxidizing a surface of said aluminum film by an oxidizing material;
- and, bringing a resulting forcibly oxidized layer into contact with a fluorination gas to form a fluorinated layer having 1 μm or more of thickness, wherein said fluorinated layer consists of a first layer, which essentially consists of an aluminum fluoride and a second layer of aluminum, which underlies the first layer, and into which fluorine is diffused.
A fluorination process of metal, comprising the steps of:
- forcibly oxidizing a surface of a monolithic metal which is at least one metal selected from the group consisting of nickel, copper and silver, by an oxidizing material;
- and, bringing a resulting forcibly oxidized layer into contact with a fluorination gas to form a fluorinated layer having 1 μm or more of thickness.
A fluorination process of metal, comprising the steps of:
- forming a metal film on a monolithic material, said metal is at least one selected from the group consisting of nickel, copper and silver;
- forcibly oxidizing a surface of said metal film by an oxidizing material;
- and, bringing a resulting forcibly oxidized layer into contact with a fluorination gas to form a fluorinated layer having 1 μm or more of thickness.
Dependencies are inferred from the claim text.