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US 6,280,518 B1Granted
Organic titanium compound suitable for MOCVD
AssigneeMitsubishi Materials Corporation
InventorsAtsushi Itsuki, Taiji Tachibana, Hiroto Uchida, Katsumi Ogi
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Abstract
Bis(dipivaloylmethanato)diisobutoxytitanium or bis(dipivaloylmethanato)-di(2,2-dimethyl-1-propoxytitanium per se, or as used as a raw material in a MOCVD process, as is or as a solution in an organic solvent, for example, tetrahydrofuran, produces a dielectric thin film of a fine texture having a film thickness which is proportional to the deposition time and the concentration of the solution.
Claims9
A stock solution, comprising:
- an organic titanium compound;
- and
- an organic solvent;
- wherein said organic titanium compound is represented by the general formula Ti(DPM)2(OR)2, wherein DPM represents dipivaloylmethanato and R represents an isobutyl or neopentyl group;
- and
- wherein said organic solvent is monomethyl- or dimethylsubstituted tetrahydrofuran.
3 more elements
A stock solution, comprising:
- an organic titanium compound;
- and
- an organic solvent;
- wherein said organic titanium compound is represented by the general formula Ti(DPM)2(OR)2, wherein DPM represents dipivaloylmethanato and R represents an isobutyl or neopentyl group;
- and
- wherein said organic solvent is selected from the group consisting of 2-methyltetrahydrofuran and 2,5-dimethyltetrahydrofuran.
3 more elements
Dependencies are inferred from the claim text.