Semiconductor device having input-output protection circuit
AssigneeMitsubishi Denki Kabushiki Kaisha
InventorsYasuo Yamaguchi, Takashi Ippooshi
Life of this patent
Estimating the term…
Abstract
A semiconductor device having a SOI structure in which an ESD resistance can be enhanced is obtained. The semiconductor device comprises PMOS transistors Q21 and Q22 which are brought into a forward bias state if a positive high voltage is applied as a surge voltage to a signal terminal 30, and NMOS transistors Q11 and Q12 which are brought into the forward bias state if a negative high voltage is applied as the surge voltage to the signal terminal 30. Furthermore, if a normal operation signal is applied from the signal terminal 30, all the NMOS transistors Q11 and Q12 and the PMOS transistors Q21 and Q22 are brought into an OFF state.
Claims18
A semiconductor device having an input-output protecting circuit section corresponding to a signal node connected to a signal terminal, and an internal circuit connected to said signal node, which are formed on a SOI substrate, comprising:
- a power supply node connected to a supply potential;
- and
- a reference potential node connected to a reference potential,
- said input-output protecting circuit section including:
- first and second discharge elements being provided between said power supply node and said signal node and having PN junctions and being reversely biased when a normal operation signal with a potential between said supply potential and said reference potential is applied to said signal terminal, said first discharge element being forward biased when a surge voltage having a first polarity is applied to said signal terminal, said second discharge element being forward biased when a surge voltage having a second polarity is applied to said signal terminal;
- and
- third and fourth discharge elements being provided between said signal node and said reference potential node and having PN junctions and being reversely biased when said normal operation signal is applied to said signal terminal, respectively, said third discharge element being forward biased when said surge voltage having the first polarity is applied to said signal terminal, said fourth discharge element being forward biased when said surge voltage having the second polarity is applied to said signal terminal.
A semiconductor device comprising:
- a SOI substrate:
- an input-output protecting circuit section connected to a signal terminal, configured to protect an internal circuit and formed on said SOI substrate;
- and
- a potential fixing node which is one of a power supply node and a reference potential node
- said input-output protecting circuit section including:
- a MOS transistor of a predetermined conductivity type having a first electrode region connected to said signal terminal and a second electrode region connected to said potential fixing node;
- a first capacitor inserted between said first electrode region and a gate electrode of said MOS transistor;
- a second capacitor inserted between said potential fixing node and said gate electrode of said MOS transistor;
- and
- a pseudo MOS transistor section comprising a pseudo gate electrode, a pseudo gate insulation film, and first, second and third diffusing regions corresponding to said gate electrode of said MOS transistor, a gate insulation film, a channel formation region, said first electrode region and said second electrode region respectively, and does not function as a transistor,
- wherein said first capacitor includes a capacitor formed by a part of said gate electrode of said MOS transistor and a part of said first electrode region with said gate insulation film interposed therebetween,
- wherein said second capacitor includes a capacitor formed between said pseudo gate electrode and said channel formation region of said pseudo MOS transistor, and
- wherein a capacity value of said second capacitor is set greater than that of said first capacitor in such a manner that said MOS transistor is reversely biased when said normal operation signal is applied to said signal terminal, and is forward biased when a surge voltage having a first or second polarity is applied to said signal terminal.
A semiconductor device comprising:
- an SOI substrate;
- an input-output protecting circuit section comprising a MOS transistor for input-output protection formed on said SOI substrate;
- and
- an internal circuit section comprising a MOS transistor for an internal circuit formed on said SOI substrate and configured to perform a predetermined signal processing;
- wherein said MOS transistor for input-output protection has a structure in which punch through is caused more easily than in said MOS transistor for an internal circuit.
A semiconductor device comprising an input-output protecting circuit section having a MOS transistor for input-output protection formed on an active region provided on a SOI substrate,
- wherein a gate electrode of said MOS transistor for input-output protection is formed within said active region on a plane, and
- wherein said gate electrode does not protrude from said active region.
A semiconductor device comprising an input-output protecting circuit section formed on a SOI substrate and having first and second diodes connected to a signal terminal,
- said input-output protecting circuit section including:
- a first semiconductor region of a first conductivity type;
- a second semiconductor region of a second conductivity type formed adjacently to said first semiconductor region;
- a third semiconductor region of the first conductivity type formed independent of said first and second semiconductor regions;
- a fourth semiconductor region of the second conductivity type formed adjacently to said third semiconductor region;
- first to fourth silicide regions which are selectively formed on surfaces of said first to fourth semiconductor regions, respectively;
- an interlayer dielectric film formed by covering said first to fourth semiconductor regions including said first to fourth silicide regions, said interlayer dielectric film having first and fourth openings formed on said first to fourth silicide regions, respectively;
- a first wiring layer connected to a reference potential and formed on said first silicide region through said first opening of said interlayer dielectric film;
- a second wiring layer connected to said signal terminal and formed on said second and third silicide regions through said first and second openings of said interlayer dielectric film;
- and
- a third wiring layer connected to a power supply and formed on said fourth silicide region through said fourth opening of said interlayer dielectric film,
- wherein said first diode is formed by said first and second semiconductor regions, and said second diode is formed by said third and fourth semiconductor regions.
Dependencies are inferred from the claim text.