Metal polishing composition
AssigneeHMT Technology Corporation
InventorsJiangning Li, Ming M. Yang
Life of this patent
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Abstract
Polishing slurries for use in polishing substrates having a nickel or nickel-containing surface, such as those used for magnetic media, are described. The slurries include, in addition to a chemical etchant such as aluminum nitrate and suspended abrasive particles, an oxidizer which converts nickel metal at the surface to nickel oxide, but does not solubilize the nickel oxide in the aqueous medium to any significant degree. Preferred oxidizers include hydrogen peroxide, ferric nitrate and potassium iodate.
Claims17
A composition for use in polishing a substrate having a nickel or nickel-containing surface, comprising an aqueous medium containing
- (a) a chemical etchant, soluble in the aqueous medium and effective to convert nickel metal at said surface to a soluble nickel salt;
- (b) suspended abrasive particles;
- and
- (c) an oxidizer, wherein said oxidizer is soluble in the aqueous medium, is effective to convert nickel metal at said surface to nickel oxide,
- wherein each of the etchant and the oxidizer is substantially ineffective, under conditions of said polishing, to solubilize said nickel oxide in the aqueous medium.
A composition for use in polishing a substrate having a nickel or nickel-containing surface, comprising an aqueous medium containing
- (a) a chemical etchant which is soluble in the aqueous medium, effective to convert nickel metal at said surface to a soluble nickel salt, and substantially ineffective, under conditions of said polishing, to solubilize said nickel oxide in the aqueous medium;
- (b) suspended abrasive particles;
- and
- (c) an oxidizer selected from H2O2, Fe(NO3)3, and KIO3.
A composition for use in polishing a substrate having a nickel or nickel-containing surface, comprising an aqueous medium containing (a) about 0.1 to 1.0 weight percent Al(NO3)3;
- (b) suspended abrasive particles;
- and (c) about 0.1 to 3.0 weight percent H2O2.
Dependencies are inferred from the claim text.