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US 6,271,574 B1Granted
Integrated circuit fuse with localized fusing point
AssigneeSTMicroelectronics S.r.l.
InventorsPhilippe Delpech, Nathalie Revil
Life of this patent
Estimating the term…
Abstract
An integrated circuit fuse includes a substantially bar-shaped central region and zones having electrical contacts. The central region includes a thinned zone forming a weak point facilitating fusing of the fuse by increasing the local current density as compared to standard fusing conditions. The thinned zone is preferably obtained by proximity optical effect between the fuse and adjacent dummy elements.
Claims26
An integrated circuit fuse comprising:
- a substantially rectangular electrically conducting region;
- a respective electrical contact zone comprising at least one electrical contact at each end of said substantially rectangular electrically conducting region;
- said substantially rectangular electrically conducting region comprising at least one first portion having a first width and at least one second portion having a second width less than the first width so that said at least one second portion forms a weak point facilitating fusing of the integrated circuit fuse by increasing a local current density in the integrated circuit fuse;
- and
- at least one dummy element having a spacing from said at least one second portion for providing an optical proximity effect during processing so that the second width is less than the first width.
2 more elements
An integrated circuit fuse comprising:
- a substantially rectangular electrically conducting region;
- and
- a respective electrical contact zone at each end of said substantially rectangular electrically conducting region;
- said substantially rectangular electrically conducting region comprising at least one first portion having a first width and at least one second portion having a second width less than the first width;
- and
- at least one dummy element having a spacing from said at least one second portion for providing an optical proximity effect during processing so that the second width is less than the first width.
3 more elements
A method for forming an integrated circuit fuse comprising:
- forming a substantially rectangular electrically conducting region comprising at least one first portion having a first width;
- forming at least one dummy element having a spacing from the first width of the substantially rectangular electrically conducting region for providing an optical proximity effect during processing;
- forming at least one second portion in the substantially rectangular electrically conducting region to have a second width less than the first width using the optical proximity effect;
- and
- forming a respective electrical contact zone comprising at least one electrical contact at each end of the substantially rectangular electrically conducting region.
2 more elements
Dependencies are inferred from the claim text.