US 6,271,123 B1Granted

Chemical-mechanical polish method using an undoped silicon glass stop layer for polishing BPSG

AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.

InventorsSyun-Ming Jang, Chung-Long Chang

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Abstract

A method using chemical-mechanical polishing for planarizing a BPSG layer 30 using a overlying Undoped Silicate Glass (USG) cap layer 40 comprising: (a) form a BPSG layer 30 over the semiconductor structure 12; the BPSG layer 30 over the periphery area 16 having a first thickness; (b) form a cap layer 40 composed of undoped silicon glass (USG) over the BPSG layer 30; the cap layer has a thickness that is at less than half of the first thickness of the BPSG layer; the top surface of the cap layer 40 in the cell area 14 is higher than the top surface of the BPSG layer 30 in the periphery area 16; (c) chemical-mechanical polish the cap layer 40 and the BPSG layer 30 over the cell area using the cap layer 40 over the periphery area 16 to retard the chemical-mechanical polish process when the top surface of the BPSG layer 30 over the cell area 14 is even with the cap layer 40 over the periphery area 16; and the cap layer 40 remains over the Periphery area 16.

Claims3

Dependent claims

A method of fabrication of a planarized BPSG layer using a cap layer;

comprising the steps of:
a) providing a semiconductor structure over a substrate;
said semiconductor structure having at least a cell area and a periphery area;
the surface of said semiconductor structure in said cell area being higher than in said periphery area;
said cell area has a plurality of levels of conductive lines surrounded by a dielectric material;
forming a first silicon oxide layer over said dielectric material;
b) forming a BPSG layer over said first silicon oxide layer;
said BPSG layer over said periphery area having a first thickness;
said BPSG layer having a top surface in said cell area and in said periphery area;
said BPSG layer formed by a process of a selected from the group consisting of PE-TEOS and SACVD BPO3 TEOS, and said BPSG layer has a B concentration in a range of between about 3% and 6% and a P concentration in a range of between about 2.0% and 4.5% said B concentration and said P concentration are constant throughout the BPSG layer;, and said BPSG layer has said first thickness in a range of between about 3000 and 15,000 Å;
c) forming a cap layer composed of undoped silicon glass (USG) over said BPSG layer;
said cap layer has a thickness that is at less than half of said first thickness of said BPSG layer;
said cap layer having a top surface in said cell area and in said periphery area;
Said top surface of said cap layer in said cell area is higher than the top surface of said BPSG layer in said periphery area;
d) chemical-mechanical polishing said cap layer and said BPSG layer over said cell area using said cap layer over said periphery area to retard the chemical-mechanical polish process when the top surface of said BPSG layer over said cell area is even with said cap layer over said periphery area;
and said cap layer remaining over said Periphery area;
the chemical-mechanical polishing not exposing said first oxide layer over said cell area.

14 more elements

A method of fabrication of a planarized BPSG layer over a semiconductor structure;

comprising the steps of:
a) providing a semiconductor structure over a substrate;
said semiconductor structure having at least a cell area and a periphery area;
the surface of said semiconductor structure in said cell area being higher than in said periphery area;
said cell area has a plurality of levels of conductive lines surrounded by a dielectric material;
forming a first silicon oxide layer over said dielectric material;
b) forming a BPSG layer over said first silicon oxide layer;
said BPSG layer over said periphery area having a first thickness;
said BPSG layer has a B concentration in a range of between about 3% and 6%, and a P concentration in a range of between about 2.0% and 4.5% said B concentration and said P concentration are constant throughout the BPSG layer;
(b-1) said BPSG layer has said first thickness in a range of between about 3000 and 15,000 Å;
c) forming a cap layer is composed of undoped silicon glass (USG) over said BPSG layer;
said cap layer has a thickness that is at less than half of said first thickness of said BPSG layer;
Said top surface of said cap layer in said cell area is higher than the top surface of said BPSG layer in said periphery area;
(c-1) said cap layer composed of undoped silicon glass (USG) is formed using of a process selected from the group consisting of plasma enhanced-tetraethoxysilane (PE-TEOS) and sub atmospheric chemical vapor deposition (SACVD);
(c-2) said cap layer having a thickness in a range of between about 500 and 2000 Å;
d) chemical-mechanical polishing said cap layer and said BPSG layer over said cell area using said cap layer over said periphery area to retard the chemical-mechanical polish process when the top surface of said BPSG layer over said cell area is even with said cap layer over said periphery area;
and said cap layer remaining over said Periphery area;
Said BPSG layer over said cell area has a thickness in a range of between about 1000 and 5000 Å and the chemical-mechanical polishing not exposing said first oxide layer over said cell area.

15 more elements

A method of fabrication of a planarized BPSG layer over a semiconductor structure;

comprising the steps of:
a) providing a semiconductor structure over a substrate;
said semiconductor structure having at least a cell area and a periphery area;
the surface of said semiconductor structure in said cell area being higher than in said periphery area;
said cell area has a plurality of levels of conductive lines surrounded by a dielectric material;
forming a first silicon oxide layer over said dielectric material;
b) forming a first silicon oxide layer using a PE-TEOS process over said semiconductor structure;
c) forming a BPSG layer on said first silicon oxide layer;
said BPSG layer over said periphery area having a first thickness;
said BPSG layer is formed by a process comprising:
a O3 flow rate between about 3150 and 5800 sccm;
a He flow rate between 4200 and 7800 sccm;
a TEOS flow rate between 350 and 650 sccm;
a TEB flow rate between 135 and 250 mgm:
a TEPO flow rate between 20 and 45 mgm;
a pressure between 150 and 250 torr;
a temperature between 400 and 550° C.;
where said BPSG layer has a B % concentration between 2 and 6 Wt % and a P concentration between 3 and 4.5 wt percent;
(c-1) said BPSG layer has said first thickness in a range of between about 3000 and 15,000 Å;
d) forming a cap layer composed of undoped silicon glass (USG) over said BPSG layer;
said cap layer has a thickness that is at less than one third of said first thickness of said BPSG layer;
Said top surface of said cap layer in said cell area is higher than the top surface of said BPSG layer in said periphery area;
said cap layer is formed using a process comprising:
a O2 flow between 700 and 1300 sccm;
He flow between 900 and 1500 sccm;
a TEOS flow between 700 and 1300 mgm;
a pressure between 5.7 and 11 torr;
a temperature between 280 and 520° C.;
and a power between 472 and 878 watts;
(d-1) said cap layer composed of undoped silicon glass (USG) is formed using of a process selected from the group consisting of plasma enhanced-tetraethoxysilane (PE-TEOS) and sub atmospheric chemical vapor deposition (SACVD);
and said cap layer having a thickness in a range of between about 500 and 2000 Å;
e) chemical-mechanical polishing said cap layer and said BPSG layer over said cell area using said cap layer over said periphery area to retard the chemical-mechanical polish process when the top surface of said BPSG layer over said cell area is even with said cap layer over said periphery area;
and said cap layer remaining over said Periphery area;
Said BPSG layer over said cell area has a thickness in a range of between about 1000 and 5000 Å:
said USG cap layer has a chemical-mechanical polish rate ratio to said BPSG layer in a range of between about 2.5:1 and 3.5:1;
and the chemical-mechanical polishing not exposing said first oxide layer over said cell area.

33 more elements

Dependencies are inferred from the claim text.