US 6,271,063 B1Granted

Method of making an SRAM cell and structure

AssigneeSTMicroelectronics S.r.l.

InventorsTsiu Chiu Chan, Frank Randolph Bryant

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Abstract

A six transistor static random access memory (SRAM) cell with thin-film pull-up transistors and method of making the same includes providing two bulk silicon pull-down transistors of a first conductivity type, two active gated pull-up thin-film transistors (TFTs) of a second conductivity type, two pass gates, a common word line, and two bit line contacts. The bulk silicon pull-down transistors, two active gated pull-up TFTs, and two pass gates are connected at four shared contacts. In addition, the two bulk silicon pull-down transistors and the two active gated pull-up TFTs are formed with two polysilicon layers, a first of the polysilicon layers (poly1) is salicided and includes poly1 gate electrodes for the two bulk silicon pull-down transistors. A second of the polysilicon layers (poly2) includes desired poly2 stringers disposed along side edges of the poly1 gate electrodes, the desired poly2 stringers forming respective channel regions of the pull-up TFTs.

Claims7

Dependent claims

A method of producing a static random access memory (SRAM) semiconductor device structure with thin-film pull-up transistors, comprising the steps of:

(a) forming an active well region of a first conductivity type in a semiconductor substrate;
(b) forming field isolation regions within the active well region;
(c) forming a first polysilicon (poly1) gate stack, the poly1 gate stack including a gate oxide, a first polysilicon, salicide, and an oxide;
(d) patterning and etching the poly1 gate stack in a desired manner, wherein the first polysilicon and salicide form appropriate gate electrodes for bulk silicon transistor devices of a second conductivity type to be formed in the ES semiconductor substrate;
(e) forming lightly doped drain (ldd) regions of the second conductivity type, oxide sidewall spacers, and source/drain (s/d) regions of the second conductivity type;
(f) forming a second gate oxide for yet to be completed thin-film pull up transistors (TFTs) of the first conductivity type;
(g) patterning and etching shared contact regions in the second gate oxide;
(h) depositing a second polysilicon (poly2), wherein the poly2 is used for an active area to poly1 interconnect strap, Vcc, and for channel regions of the yet to be completed first conductivity type channel thin-film pull up transistors;
(i) implanting ions of the first conductivity type for adjusting a threshold voltage Vt of the yet to be completed first conductivity type channel thin-film pull up transistors;
(j) patterning for a Vcc/source-drain implant and shared contact areas of the poly2;
(k) implanting ions of the first conductivity type for the Vcc/source-drain and shared contacts, wherein the implant includes a highly doped implant for the thin-film pull up transistors, the highly doped implant further extending close to an active/gated source area of each thin-film pull up transistor, and wherein a gate electrode of the thin-film pull up transistors is formed by a substrate storage node side of a second conductivity type channel pull down transistors formed in the semiconductor substrate;
(l) patterning and etching second-polysilicon shared contacts and a Vcc trace, wherein poly2 stringers are created along side edges of the poly1 patterned gate stack;
(m) patterning a stringer removal mask for protecting desired poly2 stringers along side edges of the poly1 patterned gate stack;
(n) etching to remove undesired poly2 stringers, wherein the remaining poly2 stringers form the channel regions of the thin-film pull up transistors;
and
(o) depositing a dielectric material and continuing with a backend interconnect processing.

13 more elements

A method of producing a static random access memory (SRAM) semiconductor device structure with P-channel thin-film pull-up transistors, comprising the steps of:

(a) forming P-well and N-well regions in a silicon substrate;
(b) forming field oxide isolation regions;
(c) adjusting threshold voltages Vtn and Vtp for bulk silicon N-channel and P-channel devices by ion implantations;
(d) growing gate oxides on the order of 90 Å (angstroms);
(e) depositing gate electrode stack layers including 1500 Å of a first polysilicon (poly1), 1000 Å of a polycide (silicidated polysilicon), and 1500 Å of a first oxide;
(f) defining and etching the first oxide at polysilicon shared contact regions;
(g) defining and etching the gate electrode stack layers according to desired N-channel and P-channel devices;
(h) forming lightly doped drain regions for respective N-channel and P-channel devices in the silicon substrate;
(i) forming oxide sidewall spacers;
(j) forming N+ source/drain (s/d) regions for the N-channel devices and P+ s/d regions for the P-channel devices in the silicon substrate;
(k) saliciding s/d regions;
(l) depositing a second gate oxide on the order of 200 Å in desired regions for the thin-film load transistors (TFT);
(m) defining and etching the second gate oxide for desired shared contact regions in the silicon substrate;
(n) depositing a second polysilicon on the order of 500 Å;
(o) doping the second polysilicon according to a desired channel doping of the P-channel thin-film transistor (TFT) by ion implantation;
(p) defining and doping a s/d region of the P-channel TFT by ion implantation;
(q) defining and etching the second polysilicon for the TFT and a Vcc trace, the Vcc trace acting as a source region of the P-channel TFT, wherein polysilicon stringers of the second polysilicon remain along side edges of the first polysilicon patterned gate electrode stack layers;
(r) defining and etching unwanted second polysilicon stringers, wherein desired second polysilicon stringers are kept for use as the TFT channels;
(s) depositing an undoped oxide, a doped oxide, and reflowing the undoped and doped oxides;
and
(t) continuing normal interconnection process steps.

18 more elements

Dependencies are inferred from the claim text.

Facts

Application: 09/593,334Filed 14 Jun 2000 · division
Priority: 24 Jun 1997
Granted: 7 Aug 2001
Term ends: Not estimatedThe source records don’t support an estimate.

Classification5 codes

H10B 10/00
Static random access memory [sram] devices
H10B 10/125
Comprising a MOSFET load element: the MOSFET being a thin film transistor [TFT]
Y10S 257/903
Active solid-state devices, e.g. transistors, solid-state diodes: fET configuration adapted for use as static memory cell
H10B
Electronic memory devices