Positive silicone-containing photosensitive composition

A positive silicone-containing photosensitive composition which comprises:

• (a) a water-insoluble and alkali-soluble polymer having a structure represented by the following formula (I) and/or (II):
• wherein X represents a group selected from the group consisting of a —C(═O)—R group, a —CH(OH)—R group, and a carboxyl group, and a plurality of X's may be the same or different;
• R represents a hydrogen atom or a hydrocarbon group which may have a substituent;
• R′, R″, R″′, R″″ and R″″′, which may be the same or different, each represents a group selected from the group consisting of a hydroxyl group, and an alkyl, cycloalkyl, alkoxyl, alkenyl, aralkyl and phenyl groups each of which may have a substituent;
• Y represents an alkyl group, an alkoxyl group or a siloxyl group;
• R0 represents a group selected from the group consisting of a hydrogen atom, a halogen atom, a substituted or unsubstituted aliphatic hydrocarbon group and a substituted or unsubstituted aromatic hydrocarbon group;
• l, m, n and q each represents 0 or a positive integer;
• and p represents a positive integer;
• (b) a compound which generates an acid upon irradiation with actinic rays or radiation, and
• (c) a polymer which has a repeating unit containing a group represented by formula (III), (IV) or (V) at the side chain, and shows the enhanced solubility in an alkaline developing solution by the action or an acid:
• wherein Ra, Rb and Rc each represents a hydrogen atom, or a hydrocarbon group which may have a substituent;
• and s represents an integer of 2 or more.