Back to results
US 6,270,939 B1Granted
Radiation-sensitive resin composition
AssigneeJsr Corporation
InventorsYoshihiro Hosaka, Ikuo Nozue, Masashige Takatori, Yoshiyuki Harita
Life of this patent
Estimating the term…
Abstract
A radiation-sensitive resin composition comprising a solution of an alkali-soluble resin and a radiation-sensitive compound in a solvent comprising a monooxymonocarboxylic acid ester. This composition has a high storage stability (i.e., a very small amount of fine particles are formed during storage) and is suited for use as a resist for making integrated circuits.
Claims15
A radiation-sensitive resin composition comprising a solution of an alkali-soluble resin and a radiation-sensitive compound in a solvent comprising a monooxymonocarboxylic acid ester.
Dependencies are inferred from the claim text.