Method for producing narrow wires comprising titanium oxide, and narrow wires and structures produced by the same method
AssigneeCanon Kabushiki Kaisha
InventorsTatsuya Iwasaki, Tohru Den
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Abstract
A method for producing narrow wires including titanium oxide of high crystallinity and diameter of the order of nanometer, in particular whiskers of titanium oxide, and including a first step of preparing a base having a titanium-including surface, second step of discretely depositing a material other than titanium over the above surface, and third step of thermally treating the above surface, obtained by the second step, in a titanium-oxidizing atmosphere.
Claims36
A method for producing narrow wires comprising titanium oxide, wherein said method comprises:
- (A) a first step of preparing a base having a titanium-containing surface;
- (B) a second step of discretely depositing a material other than titanium on the surface;
- and
- (C) a third step of thermally treating the surface, obtained by the second step, in a titanium-oxidizing atmosphere.
A method for producing narrow wires comprising titanium oxide, wherein said method comprises:
- (A) a first step of preparing a base having a titanium-containing surface;
- (B) a second step of depositing a material other than titanium on the surface;
- and
- (C) a third step of thermally treating the surface, obtained by the second step, in a titanium-oxidizing atmosphere.
A method for producing narrow wires comprising titanium oxide, wherein said method comprises:
- (A) a first step of preparing a base having a titanium-containing surface;
- (B) a second step of depositing a metallic element other than titanium on the surface, by bringing a liquid containing the metallic element in contact with the surface;
- and
- (C) a third step of thermally treating the surface in a titanium-oxidizing atmosphere.
A method for producing narrow wires comprising titanium oxide, wherein said method comprises:
- (A) a first step of preparing a base having a titanium-containing surface;
- (B) a second step of roughening the above surface;
- and
- (C) a third step of thermally treating the above surface in a titanium-oxidizing atmosphere.
A method for producing narrow wires comprising titanium oxide, wherein said method comprises:
- (A) a first step of preparing a base having a titanium-containing surface;
- (B) a second step of irradiating the surface with ultraviolet ray;
- and
- (C) a third step of thermally treating the above surface in a titanium-oxidizing atmosphere.
Dependencies are inferred from the claim text.