Installation for wet-treating substrates
AssigneeSteag MicroTech GmbH
InventorsJurgen Funkhanel, Dieter Meister, Martin Weber, Felix Wehrle
Life of this patent
Estimating the term…
Abstract
In a device for the wet treatment of substrates (3) in a container (1), containing a treatment fluid (2), whereby the substrates (3) are introduced into the container (1) with a substrate carrier (5), an optimal alignment and centering of the substrates (3) will result within the container (1) upon lifting from the container (1) with the aid of a substrate receiving device (4) provided within the container (1).
Claims48
A device (16) for wet treatment of substrates (3) in a treatment fluid (2), said device comprising:
- a container (1) for receiving a treatment fluid;
- a substrate carrier (5) for introducing the substrates (3) into said container (1);
- a receiving device (4) for the substrates (3) arranged in said container (1);
- and
- a lifting device (8) for the substrates (3);
- wherein said substrate carrier (5), said receiving device (4) and said lifting device (8) are movable relative to one another in said container (1) in a vertical direction.
A method for wet treatment of substrates (3) in a container (1) containing a treatment fluid (2), said method comprising the steps of:
- introducing the substrate (3) by a substrate carrier (5) into the container (1);
- transferring the substrate (3) from the substrate carrier (5) into a receiving device (4) for the substrates (3) arranged within the container (1) wherein the step of transferring includes moving the substrate carrier (5) and the receiving device (4) relative to one another;
- and
- lifting the substrates (3) by a lifting device (8) out of the container (1).
Dependencies are inferred from the claim text.