Spin processing apparatus
AssigneeEbara Corporation
InventorsHiroyuki Shinozaki, Junichiro Yoshioka, Kazuaki Maeda, Akihisa Hongo
Life of this patent
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Abstract
A spin processing apparatus can prevent contamination of workpieces by wear particles, and can operate at high efficiency while lowering the noise level associated with the operation of the apparatus. The spin processing apparatus includes a chamber, a spin holder disposed inside the chamber for holding workpieces, and driver device for rotating the spin holder. A supporting device is provided for rotatably supporting the spin holder in a non-contact manner through a magnetically-operated mechanism.
Claims19
A spin processing apparatus for processing workpieces while rotating the workpieces, said apparatus comprising:
- a chamber;
- a spin holder, disposed in said chamber, for holding workpieces, said spin holder including two side plates, and a plurality of rods, connecting said two side plates, for supporting the workpieces;
- at least one rotational shaft extending from one of said plates and defining a rotational axis of said spin holder;
- a driver device for rotating said rotational shaft, and thereby said spin holder, about said rotational axis;
- a supporting device, including a magnetically operated mechanism, for rotatably supporting said rotational shaft in a non-contact manner;
- and
- anti-vibration positioning means for controlling vibrational movement of said spin holder upon stopping of said spin holder.
A spin processing apparatus for processing workpieces while rotating the workpieces, said apparatus comprising:
- a chamber;
- a spin holder, disposed in said chamber, for holding workpieces, said spin holder including two side plates, and a plurality of rods, connecting said two side plates, for supporting the workpieces;
- at least one rotational shaft extending from one of said plates and defining a rotational axis of said spin holder;
- a driver device for rotating said rotational shaft, and thereby said spin holder, about said rotational axis;
- a supporting device, including a magnetically operated mechanism, for rotatably supporting said rotational shaft in a non-contact manner;
- and
- a pressure control for controlling a pressure within said chamber over a pressure range from atmospheric pressure to a high vacuum.
Dependencies are inferred from the claim text.