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US 6,267,605 B1Granted
Self positioning, passive MEMS mirror structures
AssigneeXerox Corporation
InventorDavid K. Biegelsen
Life of this patent
Estimating the term…
Abstract
Provided is a micro-machine mirror structure with hinges which after being released from a sacrificial layer will result in the mirror structure being lifted out of the plane of the substrate to a fixed defined geometric angle. Stresses in a metal layer of the mechanism, along with a constraint mechanism, causes the mirror structure to be maintained at the desire angle.
Claims9
A MEMS structure comprising:
- a substrate;
- a spring comprising a material initially fixed to the substrate along a length of the spring, the material having an inherent stress gradient therein when initially fixed to the substrate;
- a non-stressed constraint plate deposited on the substrate, the non-stressed constraint plate having a minimal inherent stress gradient;
- a hinge member, a first portion of the hinge member connected to the spring, and a second portion of the hinge member connected to the non-stressed constraint plate;
- and
- a constraint mechanism formed on the substrate, such that at least a portion of the constraint plate is in control of the constraint mechanism,
- wherein at least a free portion of the spring and the constraint plate are released from the substrate while an anchor portion of the spring remains fixed to the substrate and the inherent stress gradient biases the free portion away from the substrate until constrained by the constraint mechanism.
4 more elements
Dependencies are inferred from the claim text.