US 6,267,549 B1Granted

Dual independent robot blades with minimal offset

AssigneeApplied Materials, Inc.

InventorsWilliam Brown, Michael Welch

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Abstract

A wafer handling robot system (10) operates in a wafer chamber (40) and comprises two independent robot blades, an upper blade (18) surmounting a lower blade (26). A pair of wafers (28, 32) are supported and positioned at the outer ends (78) of the upper and lower blades (18, 26). The upper robot blade (18) keeps an upper wafer (28) at a level just above the level at which the lower robot blade (26) keeps a lower wafer (32). Because the wafers are virtually at the same level, the same wafer lift mechanism can be used in the wafer chamber to lift and remove or replace the wafers on the two blades. By offsetting the height of the wafers by minimal amounts, the throughput of the system can be increased by up to a factor of two over a single robot blade system, particularly if the robot is the limiting factor on throughput. This throughput enhancement represents a substantial gain with a relatively simple and inexpensive addition to the equipment.

Claims11

Dependent claims

A robot blade system for moving substrates into and out of a chamber through an opening, the robot blade system comprising:

a first robot blade for supporting a first substrate;
a second robot blade disposed generally above and spaced from the first robot blade by a small distance for supporting a second substrate;
a first robot arm coupled to the first robot blade for moving the first substrate and at least a portion of the first robot blade through the opening into the chamber and moving the first substrate and the first robot blade out of the chamber;
and
a second robot arm coupled to the second robot blade for moving the second substrate and at least a portion of the second robot blade through the opening into the chamber and moving the second substrate and the second robot blade out of the chamber, the second robot arm being independently movable from the first robot arm,
wherein each robot arm comprises a connecting link, a bracket coupled between the first and second drive shafts spaced from one another, a first parallel link having a first end pivotally coupled to a first point on the first robot blade and a second end pivotally coupled to a first point on the connecting link, a second parallel link generally parallel to the first parallel link and having a first end pivotally coupled to a second point on the first robot blade spaced from the first point and a second end pivotally coupled to a second point on the connecting link spaced from the second point, a third parallel link having a first end pivotally coupled to the first drive shaft and a second end pivotally coupled to the first point on the connecting link, and a fourth parallel link generally parallel to the third parallel link and having a first end, pivotally coupled to the second drive shaft and a second end pivotally coupled to the second point on the connecting link.

3 more elements

A method for moving substrates into and out of a chamber through an opening, the method comprising:

supporting a first substrate on a first robot blade coupled to a first robot arm;
supporting a second substrate on a second robot blade coupled to a second robot arm and disposed generally above and spaced from the first robot blade by a distance, wherein each robot arm comprises a connecting link, a bracket coupled between the first and second drive shafts spaced from one another, a first parallel link having a first end pivotally coupled to a first point on the first robot blade and a second end pivotally coupled to a first point on the connecting link, a second parallel link generally parallel to the first parallel link and having a first end pivotally coupled to a second point on the first robot blade spaced from the first point and a second end pivotally coupled to a second point on the connecting link spaced from the second point, a third parallel link having a first end pivotally coupled to the first drive shaft and a second end pivotally coupled to the first point on the connecting link, and a fourth parallel link generally parallel to the third parallel link and having a first end pivotally coupled to the second drive shaft and a second end pivotally coupled to the second point on the connecting link;
moving the first substrate and at least a portion of the first robot blade through the opening into the chamber;
removing the first substrate from the first robot blade using a wafer lift mechanism;
moving the first robot blade out of the chamber;
returning the first robot blade through the opening into the chamber;
placing the first substrate on the first robot blade using the wafer lift mechanism;
moving the first substrate arid the first robot blade out of the chamber;
moving the second substrate and at least a portion of the second robot blade through the opening into the chamber;
and
removing the second substrate from the second robot blade using the wafer lift mechanism.

8 more elements

Dependencies are inferred from the claim text.