Stress adjustment method of X-ray mask
AssigneeMitsubishi Denki Kabushiki Kaisha
InventorsHideki Yabe, Kaeko Kitamura, Kenji Marumoto, Sunao Aya, Koji Kise
Life of this patent
Estimating the term…
Abstract
An X-ray absorber is deposited on a membrane. A stress adjust step is applied so that the average film stress of the X-ray absorber is 0. After patterning the X-ray absorber, the position accuracy of the pattern is measured. Then, a stress adjust process is applied to the patterned X-ray mask. Accordingly, a stress adjustment method is used to acquire an X-ray mask that has no pattern position offset of the X-ray absorber.
Claims18
A method of stress adjustment of an X-ray mask comprising applying a stress adjusting process to an X-ray mask, including an X-ray absorber of a material that blocks transmission of X-rays, after patterning said X-ray absorber, the stress adjusting process including at least one process selected from the group consisting of annealing, etching, film deposition, oxidation, and chemical reduction of said X-ray mask.
A method of stress adjustment of an X-ray mask including:
- depositing a film of an X-ray absorber on a supporting substrate;
- depositing a mask layer on said film of said X-ray absorber;
- depositing a resist on said mask layer and forming a pattern in said resist, exposing parts of said mask layer;
- patterning said mask layer using the pattern of said resist, exposing parts of said film of said X-ray absorber;
- etching said X-ray absorber using the pattern of said mask layer as an etching mask;
- and
- applying a stress adjusting process to adjust stress in said X-ray mask, after measuring position accuracy of said X-ray absorber, by etching said mask layer.
A method of stress adjustment of an X-ray mask comprising applying a stress adjusting process to an X-ray mask, including an X-ray absorber of a material that blocks transmission of X-rays, after patterning said X-ray absorber and after measuring placement error of said x-ray absorber.
Dependencies are inferred from the claim text.