Method and apparatus for automated rework within run-to-run control semiconductor manufacturing
AssigneeAmd
InventorsChristopher A. Bode, William Jarrett Campbell
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Abstract
The present invention provides for a method and an apparatus for performing automated rework in a manufacturing process. A lot of semiconductor devices is processed using a first set of control input parameters. The first set of control input parameters is stored in a memory location. Process data from the processing of the lot of semiconductor devices is acquired. Errors in the process data are analyzed. At least one automated rework procedure is performed on the lot of semiconductor devices in response to the analysis of the process data.
Claims42
A method for performing automated rework in a manufacturing process, comprising:
- processing a lot of semiconductor devices using a first set of control input parameters;
- storing said first set of control input parameters in a memory location;
- acquiring process data from said processing of said lot of semiconductor devices;
- analyzing errors in said process data;
- determining a second set of control input parameters in response to said analysis of errors;
- and
- performing at least one automated rework procedure on said lot of semiconductor devices using said second set of control input parameters.
A computer readable program storage device encoded with instructions that, when executed by a computer, performs a method for performing automated rework in a manufacturing process, comprising:
- processing a lot of semiconductor devices using a first set of control input parameters;
- storing said first set of control input parameters in a memory location;
- acquiring process data from said processing of said lot of semiconductor devices;
- analyzing errors in said process data;
- determining a second set of control input parameters in response to said analysis of errors;
- and
- performing at least one automated rework procedure on said lot of semiconductor devices using said second set of control input parameters.
Dependencies are inferred from the claim text.