Probe card assembly and kit, and methods of using same

Probe Card Assembly, according to 8, further comprising:

• means for adjusting the orientation of the space transformer relative to the probe card without changing the orientation of the probe card.

Probe Card kit, comprising:

• a space transformer having a first surface, a second surface, a plurality of contact pads disposed on the second surface thereof, and a plurality of elongate contact structures connected to the first surface thereof, said space transformer adapted in use such that contact regions of the plurality of elongate contact structures pressure contacts with a corresponding plurality of contact areas on a semiconductor wafer;
• and
• an interposer having a first surface, a second surface, a first plurality of elongate resilient contact structures extending from the first surface thereof, said interposer adapted in use such that contact regions of the first plurality of elongate resilient contact structures make pressure connections with the plurality of contact pads on the second surface of the space transformer, the interposer having a second plurality of elongate resilient contact structures extending from the second surface thereof, said interposer adapted in use for contact regions of the second plurality of elongate resilient contact structures making pressure connections with a plurality of terminals on a probe card.

Probe Card Assembly, comprising:

• a probe card having a first surface, a second surface and a plurality of contact terminals on the first surface thereof;
• a space transformer having a first surface, a second surface, a plurality of contact pads disposed on the second surface thereof, and a first plurality of elongate resilient contact structures mounted adjacent to and extending from the first surface thereof;
• wherein the plurality of contact pads are connected to the plurality of contact terminals of the probe card.

Probe Card Assembly, according to 36, further comprising:

• means for adjusting the orientation of the space transformer relative to the probe card without changing the orientation of the probe card.

Probe Card Assembly, comprising:

• a probe card having a first surface, a second surface and a plurality of contact terminals on the first surface thereof;
• a space transformer having a first surface, a second surface, a plurality of contact pads disposed on the second surface thereof, and a first plurality of elongate contact structures mounted adjacent to and extending from the first surface thereof;
• wherein the plurality of contact pads are connected to the plurality of contact terminals of the probe card.

Probe Card Assembly, according to 44, further comprising:

• means for adjusting the orientation of the space transformer relative to the probe card without changing the orientation of the probe card.