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US 6,239,402 B1Granted
Aluminum nitride-based sintered bodies, corrosion-resistant members, metal-buried articles and semiconductor-holding apparatuses
AssigneeNGK Insulators, Ltd.
InventorsKiyoshi Araki, Yuji Katsuda, Sadanori Shimura, Tsuneaki Ohashi
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Abstract
An aluminum nitride-based sintered body is disclosed, which includes aluminum nitride as a main ingredient and magnesium and has a polycrystalline structure composed of aluminum nitride crystals.
Claims13
An aluminum nitride-based sintered body comprising aluminum nitride as a main ingredient and magnesium and having a polycrystalline structure composed of aluminum nitride crystals, wherein said magnesium is contained in an amount of not less than 0.1 wt % as calculated in the form of its oxide.
Dependencies are inferred from the claim text.