X-ray projection exposure apparatus

An X-ray projection exposure apparatus, comprising:

• a mask stage configured to hold a mask, the mask having a predetermined pattern thereon;
• a substrate stage configured to hold a substrate;
• an X-ray source that emits light including X-rays;
• an X-ray illumination optical system that directs the X-rays emitted from the X-ray source towards the mask;
• an X-ray projection and focusing optical system that receives the X-rays that have interacted with the mask, the X-ray projection and focusing optical system projecting and focusing an image of the predetermined pattern on the mask onto the substrate;
• and
• a position detection optical system that optically detects at least one of a mask alignment mark on the mask and a substrate alignment mark on the substrate,
• wherein the position detection optical system utilizes a detection light for detecting the at least one of the alignment marks, the detection light having a longer wavelength than the wavelength of the X-rays emitted from the X-ray source for exposure.