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US 6,208,408 B1Granted
Projection exposure apparatus and device manufacturing method
AssigneeCanon Kabushiki Kaisha
InventorYukio Takabayashi
Life of this patent
Estimating the term…
Abstract
A projection exposure apparatus includes an original table for holding an original having a pattern to be transferred, a projection optical system, a substrate stage for holding a substrate to be exposed through the projection optical system, and a supporting member for supporting the projection optical system, wherein at least a portion of the supporting member is made of one of a ceramics material and a compound material provided by integrally sintering a ceramics material and a metal material.
Claims18
A projection exposure apparatus, comprising:
- an original table for holding an original having a pattern to be transferred;
- a projection optical system;
- a substrate stage for holding a substrate to be exposed through said projection optical system;
- and
- a supporting member for supporting said projection optical system, wherein at least a portion of said supporting member is made of a compound material provided by an integral structure of a ceramics material and a metal material, for increasing the rigidity of the supporting member, wherein the metal material is placed inside the ceramics material or adhered to the surface of the ceramics material, and the metal material is pre-stressed so that the metal material applies a compression stress to the ceramics material.
2 more elements
A device manufacturing method, comprising:
- holding, using an original holding table, an original having a pattern to be transferred;
- providing a projection optical system;
- holding, using a substrate stage, a substrate to be exposed through the projection optical system;
- supporting the projection optical system using a supporting member, wherein at least a portion of the supporting member is made of a compound material provided by an integral structure of a ceramics material and a metal material, for increasing the rigidity of the supporting member, wherein the metal material is placed inside the ceramics material or adhered to the surface of the ceramics material, and the metal material is pre-stressed so that the metal material applies a compression stress to the ceramics material;
- and
- transferring, by exposure through the projection optical system, a pattern of an original onto a substrate to manufacture a device.
3 more elements
Dependencies are inferred from the claim text.