Semiconductor element having charge accumulating layer under gate electrode and using single electron phenomenon
AssigneeKabushiki Kaisha Toshiba
InventorsTetsufumi Tanamoto, Shinobu Fujita, Koichiro Inomata
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AssigneeKabushiki Kaisha Toshiba
InventorsTetsufumi Tanamoto, Shinobu Fujita, Koichiro Inomata
Estimating the term…
A semiconductor device according to the invention is constructed as below. A charge accumulating layer which contains a magnetic substance is formed directly on a semiconductor substrate, and a gate insulating film is formed on the charge accumulating layer. Further, a gate electrode is formed on the gate insulating film, and source and drain regions formed in surface portions of the semiconductor substrate such that the gate electrode is interposed therebetween. Another semiconductor device according to the invention is constructed as below. A first gate insulating film formed on a semiconductor substrate, and a charge accumulating layer which contains a magnetic substance is formed on the first gate insulating film. Further, a second gate insulating film is formed on the charge accumulating layer, and a gate electrode is formed on the second gate insulating film. Source and drain regions formed in surface portions of the semiconductor substrate such that the gate electrode is interposed therebetween.
A semiconductor device comprising:
A semiconductor device comprising:
A semiconductor device comprising:
A semiconductor device comprising:
Dependencies are inferred from the claim text.