Method of fabricating capacitors

Abstract

The present invention related to a method of fabricating capacitors which fabricates a plurality of capacitors of which capacitances are different one another on a semiconductor substrate. The present invention includes the steps of forming a field insulating layer providing an active area of a device in a field area on a semiconductor substrate, forming a first polysilicon layer and a first dielectric substance layer on the semiconductor substrate successively to cover the field insulating layer, forming a first dielectric layer over one stage of the field insulating layer by patterning the first dielectric substance layer, forming a second dielectric substance layer to cover the first dielectric layer on the first polysilicon layer, forming a first lower electrode and a second dielectric layer over the stage of the field insulating layer as well as forming a second lower electrode and the second dielectric layer over the other stage of the field insulating layer by patterning the second dielectric substance layer and the first polysilicon layer wherein the first dielectric layer is inserted between the first lower electrode and the second dielectric layer, forming a second polysilicon layer on the second dielectric layer, and forming a first and a second upper electrode by patterning the second polysilicon layer.

Dependencies are inferred from the claim text.