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US 6,206,975 B1Granted
Vacuum treatment system for application of thin, hard layers
AssigneeLeybold Systems GmbH
InventorsAlfred Rick, Josef Hoffmann, Klaus Michael
Life of this patent
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AssigneeLeybold Systems GmbH
InventorsAlfred Rick, Josef Hoffmann, Klaus Michael
Estimating the term…
Vacuum treatment system for application of thin layers onto substrates (36, 38, 40, 42) with a transfer chamber (5) and several treatment chambers (6, 8, 10, 12), said treatment chambers peripherally attached to the transfer chamber and being connected to said transfer chamber by means of a common opening (27, 29, 31, 33) for inlet and outlet of substrate (36, 38, 40, 42), and with a handling device (24) for transport of the substrate (36, 38, 40, 42) between the treatment chambers (6, 8, 10, 12), whereby the handling device (24) has at least one substrate holder (37, 39, 41, 43) with one pivot and/or rotating retaining part to hold the substrates (36, 38, 40, 42), by means of which the substrates (36, 38, 40, 42) can pivot and/or rotate in the treatment chambers (6, 8, 10, 12).
A vacuum treatment system for deposition of thin layers onto a substrate comprising a transfer chamber and a plurality of treatment chambers, said treatment chambers being peripherally attached to the transfer chamber and being connected to said transfer chamber by means of openings for inlet and outlet of said substrate, a handling device for transport of the substrate between the treatment chambers, said handling device having several substrate holders each with one pivotable retaining part, one rotating retaining part or one pivotal and rotating retaining part to hold the substrate, whereby several substrates can be pivoted, rotated or pivoted and rotated while located in different ones of said treatment chambers.
Dependencies are inferred from the claim text.