Semiconductor wafer carrier with grooves
AssigneeSTMicroelectronics S.r.l.
InventorsPascal Decamps, André Rochet, Daniel Gardellin
Life of this patent
Estimating the term…
Abstract
A carrier of semiconductor wafer transportation. The carrier comprising: a base; two or more walls mounted to the base, with a plurality of grooves for receiving wafers by lateral insertion thereinto through a mouth, the mouth defined by an upper wall and a substantially horizontal lower wall, wherein the groove comprises a closed end defined by a back wall joined to the upper wall and the lower wall so that the groove narrows from the mouth towards the closed end, the upper wall being slanted upward towards the mouth and the back wall being slanted towards the mouth in the region close to the horizontal wall.
Claims11
A semiconductor wafer carrier comprising:
- a base;
- and
- at least two vertical side walls mounted to the base, wherein each vertical side wall comprises a plurality of symmetrically formed horizontal grooves for receiving semiconductor wafers by lateral insertion thereinto through a mouth of each groove, each groove comprising:
- a lower wall with a first end and a second end at the mouth of the groove, the lower wall being substantially horizontal so that a wafer resting on the lower wall is substantially horizontal;
- an upper wall with a first end and a second end at the mouth of the groove, the upper wall slanting so the second end of the upper wall is at a greater distance from the lower wall than the first end of the upper wall;
- and
- a back wall having upper and lower members that form a V-shape,
- wherein the lower member of the back wall is a straight member with a first end and a second end that joins the first end of the lower wall, and
- the upper member of the back wall is a straight member with a first end that joins the first end of the lower member of the back wall and a second end that joins the first end of the upper wall.
A semiconductor wafer carrier comprising:
- a base;
- and
- at least two walls mounted to the base, with a plurality of grooves for receiving wafers by lateral insertion thereinto through a mouth, the mouth defined by an upper wall and a substantially horizontal lower wall, wherein each groove comprises a closed end with a V-shape defined by a back wall joined to the upper wall and the lower wall so that the groove narrows from the mouth towards the closed end,
- wherein the upper wall is slanted upward towards the mouth, and
- a portion of the back wall that defines an upper side of the V-shape is joined to the upper wall and slants away from the mouth when going from the upper wall towards the lower wall.
A semiconductor wafer carrier comprising:
- a base;
- and
- at least two vertical side walls mounted to the base, wherein each vertical side wall comprises a plurality of symmetrically formed horizontal grooves for receiving semiconductor wafers by lateral insertion thereinto through a mouth of each groove, each groove comprising:
- a lower wall with a first end and a second end at the mouth of the groove, the lower wall being substantially horizontal so that a wafer resting on the lower wall is substantially horizontal;
- an upper wall with a first end and a second end at the mouth of the groove;
- and
- a back wall having upper and lower members joined together to form a closed end, the groove narrowing from the mouth towards the closed end,
- wherein the upper and lower members of the back wall join at a point that is a greater distance from the mouth of the groove than both the first end of the lower wall and the first end of the upper wall.
Dependencies are inferred from the claim text.