Multi-layer metallization capacitive structure for reduction of the simultaneous switching noise in integrated circuits

Abstract

A multi-layer metallization capacitive structure is provided to a conductive line, such as a power line or signal transmission line in an integrated circuit, where the undesired effect of simultaneous switching noise (SSN) is adverse due to rapid switching of pulses in a digital signal. The multi-layer metallization capacitive structure can help reduce the SSN effect in the integrated circuit by providing at least one metallization layer which extends substantially beneath the conductive line; and at least one dielectric layer sandwiched between the power line and the metallization layer. The multi-layer metallization capacitive structure has an optimal effect if the metallization layer is designed to be precisely equal in width to the power line. The multi-layer metallization capacitive structure has an advantage over the prior art in that it can be formed together with the processing for forming multiple interconnects in the integrated circuit without the need to devise additional processes. Moreover, it requires a reduced layout area to implement as compared to the conventional on-chip capacitor.

Dependencies are inferred from the claim text.