Overvoltage protection device
AssigneeMicronas Intermetall GmbH
InventorsGuenter Igel, Joachim Krumrey
Life of this patent
Estimating the term…
Abstract
The invention relates to an overvoltage protection device and to a method for fabricating such a device. A substrate (1) is provided with a first electrode layer (2), above which extends a second electrode layer (3) which is separated from the first electrode layer (2) by a distance (d) determined by the thickness of a spacing layer (4). The spacing layer (4) has an opening (5) which forms a cavity (6) between the electrode layers (2, 3).
Claims15
An overvoltage protection device comprising a substrate, a first electrode layer deposited thereon, over which extends a second electrode layer separated from the first electrode layer in its entirety, wherein at least one portion of said first electrode layer and at least one portion of said second electrode layer are separated by at least a distance d associated with a thickness of a spacing layer, the spacing layer including an opening which forms a cavity between the electrode layers.
An overvoltage protection device comprising:
- a substrate;
- a first electrode layer formed above said substrate;
- a spacing layer formed above said first electrode layer;
- a second electrode layer formed above said spacing layer;
- and,
- a cavity formed in said spacing layer between said first and second electrode layers;
- wherein, said spacing layer separates said first electrode layer from said second electrode layer in their entireties.
An overvoltage protection device comprising:
- a substrate;
- a first electrode layer deposited over said substrate;
- a spacing layer deposited at least partially over said first electrode layer and including at least one aperture therein;
- a second electrode layer deposited over at least a portion of said spacing layer;
- wherein, said entire first and second electrode layers are separated from one another, and said aperture at least partially defines a gap between said first and second electrode layers.
An overvoltage protection device comprising:
- a substrate;
- a first electrode layer deposited over said substrate;
- a spacing layer deposited at least partially over said first electrode layer;
- a second electrode layer deposited over at least a portion of said spacing layer such that it is separated from the first electrode layer by at least distance d associated with a thickness of the portion of the spacing layer,
- wherein, the spacing layer includes at least one aperture therein which in combination with said first and second electrode layers defines a cavity.
Dependencies are inferred from the claim text.