Fuse for semiconductor device and semiconductor device
AssigneeTexas Instruments Incorporated
InventorYutaka Komai
Life of this patent
Estimating the term…
Abstract
To provide a semiconductor device fuse, which does not damage the lower layer when it is cut by irradiation with a laser beam. In forming a fuse 2 by forming an electroconductive thin film on the surface of a semiconductor substrate and patterning it, a cut part 4 is constituted by installing an expanding part 5 in a narrow-width part 3, and the cut part 4 is cut by irradiation with a laser beam. Even if scattering of the intensity of the laser beam and scattering of the irradiation position occur, no damage occurs in the lower layer, and an electrical element can be formed even at the position directly under the fuse 2. The cut part 4 preferably has a circular shape.
Claims10
A semiconductor device comprising an integrated electronic circuit formed on a semiconductor substrate;
- a fuse coupled to said electronic circuit and formed on said substrate, said fuse having a narrow width portion and a laser beam severable portion, said severable portion having a substantially circular shape, said fuse being located directly over at least one active electrical element of said integrated electronic circuit.
In a semiconductor device comprising an integrated electronic circuit, a fuse comprising:
- a first portion;
- a second portion wider than said first portion for being severed by a laser beam, said second portion having a shape corresponding to a shape of said laser beam, said fuse being placed over an active area of said integrated electronic circuit.
A semiconductor device comprising an integrated electronic circuit formed on a semiconductor substrate;
- a fuse coupled to said electronic circuit and formed on said substrate, said fuse having a narrow width portion and a laser beam severable portion, said fuse being located directly over at least one active electrical element of said integrated electronic circuit, and said severable portion having a shape chosen from one of the following:
- hexagon, octagon, other circular shaped polygon having at least 6 sides.
Dependencies are inferred from the claim text.