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US 6,204,158 B1Granted
Reduced diffusion of a mobile specie from a metal oxide ceramic into the substrate
AssigneesAdvanced Technology Materials, Inc., Infineon Technologies North America Corp.
InventorsBryan C. Hendrix, Frank S. Hintermaier, Jeffrey F. Roeder, Thomas H. Baum, Debra A. Desrochers
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Abstract
A scavenger layer is provided to prevent the diffusion of an excess mobile specie from a metal oxide ceramic into unwanted parts of a device. The scavenger layer is provided above the metal oxide ceramic. As the excess mobile specie diffuses out of the metal oxide ceramic, it migrates toward the scavenger layer and reacts with it. The reaction consumes the excess mobile specie.
Claims14
A process for fabricating a semiconductor device comprising:
- providing a substrate including a partially formed semiconductor device;
- depositing a metal oxide ceramic over the barrier layer,
- depositing a scavenger layer above the metal oxide ceramic layer;
- and
- annealing the substrate to produce a metal oxide ceramic with good electrical properties, wherein the anneal causes excess mobile specie to diffuse from the metal oxide ceramic, the scavenger layer consuming the excess mobile specie to reduce the diffusion of excess mobile specie into the substrate below.
2 more elements
Dependencies are inferred from the claim text.