Apparatus and method for transferring semiconductor die to a carrier

Abstract

An apparatus and method for transferring a semiconductor die from an adhesive film to an output carrier is disclosed. The adhesive film and associated hoop assembly on which the die are secured are inverted so that die face downward, p-side down, from the film. And an output pack is positioned beneath the die. An ejector pin exerts a force on a side of the adhesive film opposite the side on which the semiconductor die is secured to release the die. A vacuum is provided through a port in the output pack, pulling the released die into the output pack. The transfer occurs in a single step and orients the die p-side down in the output pack, thus eliminating the control arm/vacuum collet assembly and associated handling steps of conventional transfer mechanisms.

Dependencies are inferred from the claim text.