System for processing wafers and cleaning wafer-handling implements

A system for processing wafers and cleaning wafer cassettes comprising a work cell wherein the work cell comprises:

• a plurality of processing stations for processing wafers;
• a cleaning station for receiving and delivering wafers to and from a wafer cassette and for cleaning a wafer cassette;
• a transfer mechanism for moving wafers between the plurality of processing stations and the cleaning station;
• and
• wherein the cleaning station comprises:
• a housing forming an interior chamber,
• an exterior door forming a portion of the housing for providing access to the interior chamber,
• an exhaust formed on a portion of the housing,
• an interior door forming a portion of the housing for providing access to the interior chamber, and
• a plurality of gas nozzles attached to a portion of the housing for delivering a sweeping gas to the interior chamber and over a wafer cassette placed within the interior chamber and to the exhaust for removal from the interior chamber.