Transfer apparatus and transfer method for particulate material
AssigneesApplied Science Karasawa Lab. & Co., Ltd., Ball Semiconductor, Inc.
InventorYukihiko Karasawa
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AssigneesApplied Science Karasawa Lab. & Co., Ltd., Ball Semiconductor, Inc.
InventorYukihiko Karasawa
Estimating the term…
An apparatus and method for transferring a particulate material in a non-contact manner. The apparatus has a driving device including a nozzle curved surface portion fitted to the transfer pipe to join with the inner wall surface of the pipe. The nozzle curved surface portion has a curved surface whose diameter continuously increases from the inner wall surface. The driving device further includes an annular gap-forming member that forms a nozzle gap between it and the nozzle curved surface portion. A fluid is caused to flow into the transfer pipe from the driving device, thereby forming a buffer layer of a spiral flow in the vicinity of the inner wall surface of the transfer pipe and thus keeping the particulate material in a non-contact state. Moreover, a pressure gradient is produced between the inner wall surface of the transfer pipe and the central portion of the transfer pipe to make the pressure in the central portion negative relative to the pressure at the inner wall surface of the pipe, thereby transferring the particulate material while keeping it from contact with the wall surface of the transfer pipe. The apparatus is suitable for the production of spherical semiconductor devices.
An apparatus for transferring a particulate material, in the form of a quantity of spherical semiconductor particles each having a surface on which a respective spherical semiconductor integrated circuit device including a circuit is to be formed, by means of a flow of a driving fluid through a transfer pipe having in its interior an inner wall surface and an axial mid-region, said apparatus comprising:
Dependencies are inferred from the claim text.