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US 6,191,460 B1Granted
Identical gate conductivity type static random access memory cell
AssigneeIntegrated Device Technology, Inc.
InventorsJeong Y. Choi, Chuen-Der Lien
Life of this patent
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Abstract
A static random access memory cell is given increased stability and latch-up immunity by using N-type gate NMOS transistors and P-type gate PMOS transistors in the control and sensing circuits, but using the same gate conductivity type for both the NMOS and PMOS memory cell transistors. For example, both NMOS and PMOS memory cell transistors have N-type gates. Weakening the memory cell load transistors by lightly doping the source and/or drain regions further enhances stability.
Claims11
A memory integrated circuit comprising:
- a sensing circuit and a control circuit, wherein the sensing circuit and the control circuit each include PMOS transistors with P-type conductivity gate electrodes and NMOS transistors with N-type conductivity gate electrodes;
- and
- a memory cell circuit coupled to the control circuit and to the sensing circuit, wherein the memory cell circuit includes PMOS transistors and NMOS transistors coupled together and having gate electrodes of the same selected conductivity type.
A process for forming a memory cell, comprising the acts of:
- providing a semiconductor substrate;
- forming a polycrystalline silicon gate electrode layer over the semiconductor substrate;
- selectively doping the gate electrode layer over a first area of the substrate to a first conductivity type;
- selectively doping a first portion of the gate electrode layer over a second area of the substrate to the first conductivity type;
- selectively doping a second portion of the gate electrode layer over the second area to a second conductivity type opposite the first conductivity type;
- patterning the gate electrode layer to define a plurality of first conductivity type conductive gate electrodes over the first area and a plurality of conductive gate electrodes over the second area, wherein the plurality of conductive gate electrodes over the second area includes at least one first conductivity type conductive gate electrode and at least one second conductivity type conductive gate electrode;
- selectively doping the substrate adjacent at least one gate electrode over the first area to have the first conductivity type;
- selectively doping the substrate adjacent at least one gate electrode over the first area to have the second conductivity type;
- selectively doping the substrate adjacent at least one first conductivity type gate electrode over the second area to have the first conductivity type;
- selectively doping the substrate adjacent at least one second conductivity type gate electrode over the second area to have the second conductivity type;
- and
- coupling the gate electrodes and doped substrate regions in the first area so as to form a memory cell;
- whereby the second area is a control/sensing circuit area.
10 more elements
Dependencies are inferred from the claim text.