Platen for semiconductor workpieces
AssigneeTrikon Equipments Limited
InventorGordon Robert Green
Life of this patent
Estimating the term…
Abstract
A Platen, generally indicated at (10), comprises a ceramic body (11) and a workpiece support surface (12) and a base (13). Embodied within the body (11) are an electrostatic chuck electrode (40), an RF electrode (15), a heater (16), a ground plane electrode (17), an embedded thermocouple (18), and a stainless steel support (19). This combination provides a platen which can be RF driven, but has a screen to prevent unwanted plasma beneath the platen. The chuck can also be utilized as an electrostatic chuck.
Claims14
A platen for supporting a semiconductor workpiece for processing, said platen comprising an electrically insulating body having an upper workpiece support surface and a base;
- an RF electrode disposed in the body between the support surface and the base and extending generally parallel thereto;
- and a ground plane electrode disposed in the body between the RF electrode and the base.
A platen for supporting a semiconductor workpiece for processing, said platen comprising an electrically insulating body having an upper workpiece support surface and a base;
- an RF electrode disposed in the body between the support surface and the base and extending generally parallel thereto;
- and a ground plane electrode disposed in the body between the RF electrode and the base, wherein an electrical contact for the ground plane electrode is disposed at the peripheral edge of the platen.
A platen for supporting a semiconductor workpiece for processing, said platen comprising an electrically insulating body having an upper workpiece support surface and a base;
- an RF electrode disposed in the body between the support surface and the base and extending generally parallel thereto;
- and a ground plane electrode disposed in the body between the RF electrode and the base, wherein an electrical contact for the ground plane electrode is disposed at the peripheral edge of the platen, and wherein the body above the ground plane electrode is less wide than the remainder to expose a portion of the ground plane electrode to allow the electrical contact to sit on the exposed portion.
Dependencies are inferred from the claim text.