Wafer mapping system

A system for mapping positional information of a plurality of workpieces seated in a container on a load port of a tool for processing the plurality of workpieces, the system comprising:

• wherein said load port including an access port through which the plurality of workpieces are transferred, and a port door capable of covering the access port and capable of moving in a vertical direction relative to the workpieces, away from the access port;
• a transmitter mounted on the port door and moving with the port door, said transmitter capable of transmitting a beam into the container;
• a receiver mounted on the port door and moving with the port door, said receiver capable of receiving said beam and said receiver capable of indicating a first state when said receiver receives said beam and said receiver capable of indicating a second state when a workpiece prevents said beam from being received in said receiver;
• and
• means for determining the positional information of the plurality of workpieces based on a switching of said receiver between said first and second states.

A system for mapping positional information of a plurality of workpieces seated in a container on a load port of a tool for processing workpieces, the system comprising:

• wherein said load port including an access port through which the workpieces are transferred, and a port door capable of covering the access port and capable of moving in a vertical direction relative to the workpieces, away from the access port;
• a transmitter mounted on the port door and moving with the port door, said transmitter capable of transmitting a beam into the container;
• a receiver mounted on the port door and moving with the port door, said receiver capable of receiving said beam when said beam reflects off of a workpiece of the plurality of workpieces, and said receiver capable of indicating a first state when said receiver receives said beam and said receiver capable of indicating a second state when said receiver does not receive said beam;
• and
• means for determining the positional information of the plurality of workpieces based on a switching of said receiver between said first and second states.

A system for sensing information with regard to at least one workpiece within a container located on a load port of a tool for processing the at least one workpiece, the system comprising:

• wherein said load port including a port plate having an access port through which the at least one workpiece is transferred, and a port door capable of covering the access port and moving in a vertical direction relative to the at least one workpiece, away from the access port;
• a sensor mounted on the port door and moving with the port door, said sensor sensing information with regard to the at least one workpiece;
• and
• means for interpreting said information.

A system for sensing information with regard to at least one workpiece within a container located on a load port of a tool for processing the at least one workpiece, the system comprising:

• wherein said load port including an access port through which the at least one workpiece is transferred, and a port door capable of covering the access port and moving in a vertical direction away from the access port;
• a transmitter mounted on the port door and moving with the port door, said transmitter emitting a beam;
• a receiver mounted on the port door and moving with the port door, said receiver receiving said beam;
• and
• at least one reflective strip within the container for receiving said beam from said transmitter and redirecting said beam to said receiver.

A system for sensing information with regard to at least one workpiece within a container located on a load port of a tool for processing the at least one workpiece, the system comprising:

• wherein said load port including a port plate having an access port through which the at least one workpiece is transferred, and a port door capable of covering the access port and moving in a vertical direction relative to the at least one workpiece, away from the access port;
• a transmitter mounted on the port door and moving with the port door, said transmitter emitting a beam;
• a receiver mounted on the port door and moving with the port door, said receiver receiving said beam;
• and
• at least one reflective strip vertically mounted on the load port for receiving said beam from said transmitter and redirecting said beam to said receiver.