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US 6,188,162 B1Granted
High power megasonic transducer
AssigneeProduct Systems Incorporated
InventorRichard B. Vennerbeck
Life of this patent
Estimating the term…
Abstract
A megasonic transducer comprised of a stainless steel plate attached to a piezoelectric crystal by an indium attachment layer. To facilitate the attachment, a chromium layer and a silver layer are positioned between the stainless steel plate and the indium layer. Similarly, silver and chromium layers are positioned between the indium layer and the piezoelectric crystal.
Claims16
A megasonic cleaning system comprising:
- a piezoelectric crystal for generating acoustic energy in the frequency range of 0.4 to 2.0 MHz when power is applied to the piezoelectric crystal;
- an energy transmitting member adapted for positioning between the piezoelectric crystal and a volume of cleaning fluid;
- and
- an attachment layer comprised of indium positioned between the energy transmitting member and the piezoelectric crystal for attaching the piezoelectric crystal to the energy transmitting member, the attachment layer having an acoustic impedance that allows power of at least approximately 15 watts/cm2 to be applied to the piezoelectric crystal.
1 more element
A megasonic cleaning system comprising:
- a piezoelectric crystal for generating acoustic energy in the frequency range of 0.4 to 2.0 MHz;
- an energy transmitting member adapted for positioning between the piezoelectric crystal and a volume of cleaning fluid;
- and
- an attachment layer comprised of at least 99% pure indium positioned between the energy transmitting member and the piezoelectric crystal for attaching the piezoelectric crystal to the energy transmitting member.
1 more element
A megasonic cleaning system comprising:
- an energy transmitting member comprised of stainless steel;
- a piezoelectric crystal having a front surface that faces the energy transmitting member and a back surface that faces away from the energy transmitting member, the energy transmitting member being adapted for positioning between the piezoelectric crystal and a volume of cleaning fluid;
- an attachment layer comprised of indium positioned between the energy transmitting member and the piezoelectric crystal for attaching the piezoelectric crystal to the energy transmitting member, the attachment layer having a first surface facing in the direction of the energy transmitting member and a second surface facing in the direction of the piezoelectric crystal;
- a first metal layer positioned in contact with the first surface of the attachment layer;
- a second metal layer positioned in contact with the second surface of the attachment layer;
- a first blocking means for preventing the energy transmitting means from forming an alloy with the first metal layer, the first blocking means being positioned between the first metal layer and the energy transmitting member;
- and
- a third metal layer positioned in contact with the back surface of the piezoelectric crystal.
5 more elements
Dependencies are inferred from the claim text.