Methods of manufacturing semiconductive wafers and semiconductive material stencil masks
AssigneeMicron Technology, Inc.
InventorJ. Brett Rolfson
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AssigneeMicron Technology, Inc.
InventorJ. Brett Rolfson
Estimating the term…
In one aspect, the invention includes a method for manufacturing a semiconductive wafer comprising: a) providing a semiconductive material wafer having a front surface and a back surface; b) contacting the front surface with a first fluid; c) contacting the back surface with a second fluid different than the first fluid, at least one of the first and second fluids being configured to etch the semiconductive material of the wafer; at least one of the first and second fluids having a measurable component at a first concentration which is different than any concentration of said measurable component in the other of the first and second fluids; d) etching the semiconductive wafer with the at least one of the first and second fluids configured to etch the semiconductive material; and e) monitoring the measurable component concentration in at least one of the first fluid or the second fluid to ascertain if the etching has formed an opening extending completely through the substrate. In another aspect, the invention includes a method for manufacturing a semiconductive material stencil mask comprising: a) providing a semiconductive material stencil mask substrate having a front surface and a back surface; b) contacting the front surface with an inert solution having a first pH; c) contacting the back surface with an etchant having a second pH, the second pH being different than the first pH; and d) monitoring the pH of at least one of the inert solution or the etchant to ascertain if the etchant has formed an opening extending completely through the substrate.
A method for manufacturing a semiconductive wafer comprising:
A method for manufacturing a semiconductive wafer comprising:
A method for manufacturing a semiconductive wafer comprising:
A semiconductive wafer processing method comprising:
Dependencies are inferred from the claim text.