Load port

A load port for semiconductor manufacturing equipment comprising:

• an opening in said equipment for taking in a wafer;
• a cover for freely opening and closing said opening;
• a cover moving means for moving said cover;
• and
• control means to control said cover moving means to move said cover toward said opening using a relatively small force until said cover reaches a predetermined position at a predetermined distance from completely closing said opening and then to move said cover to completely close said opening using a large force which is greater than said small force used to move said cover to said predetermined position.

A load port for semiconductor manufacturing equipment comprising:

• a carrier for accommodating a wafer;
• a carrier base for transporting said carrier, while accommodating a wafer;
• a transporting means for transporting said carrier base towards an opening of said semiconductor manufacturing equipment;
• control means to control said transporting means to transport said carrier base toward said opening using a relatively small force until said carrier reaches a predetermined position at a predetermined distance from said opening and then transport said carrier base towards said opening using a force greater than said small force used to move said carrier base to said predetermined position;
• a cover on a side of said equipment opposite to said carrier and carrier base for freely opening and closing said opening;
• a cover moving means for moving said cover;
• and
• control means to control said cover moving means to move said cover toward said opening using a relatively small force until said cover reaches a predetermined position at a predetermined distance from completely closing said opening, and then to move said cover to completely close said opening using a large force which is greater than said small force used to move said cover to said predetermined position.