Heating apparatus for heating an object to be processed
AssigneeTokyo Electron Limited
InventorsEiichi Sekimoto, Mitsuhiro Tanoue
Life of this patent
Estimating the term…
Abstract
An exhaust hole has a size covering not only a first region above a hot plate but also a second region surrounding the first region. A plate ember with a plurality of openings is disposed at the mouth of the exhaust hole. The exhaust hole exhausts air from the first region and the second region, even when the heat processing is not performed. Therefore, a solvent volatilized in the first region is also exhausted from the second region and will not leak outside the apparatus.
Claims32
A heating apparatus comprising:
- a heating region having a first region for heating a mounted target object thereon;
- an exhaust cover having an exhaust hole disposed facing said first region and a second region surrounding the first region;
- an exhausting means for exhausting the first region and the second region through said exhaust hole;
- and
- a shutter member for closing up a space between a periphery of said first region and said exhaust cover when heating the target object.
A heating apparatus comprising:
- a heating region having a first region for heating a mounted target object thereon;
- an exhausting means for exhausting said first region, a second region surrounding the first region, and the first region and the second region at the same time;
- wherein the first region and the second region are exhausted even when said target object is not heated;
- and
- wherein the diameter of the opening in the first region differs from the diameter of the opening in the second region.
A heating apparatus comprising:
- a heating region having a first region for heating a mounted target object thereon;
- an exhausting means for exhausting said first region, a second region surrounding the first region, and the first region and the second region at the same time;
- wherein the first region and the second region are exhausted even when said target object is not heated;
- and
- wherein the diameter of the opening in the first region is smaller than the diameter of the opening in the second region.
A heating apparatus comprising:
- a heating region having a first region whereupon a target object is mounted and heated;
- an exhaust cover having an exhaust hole disposed facing said first region and a second region surrounding the first region;
- an exhaust connected to said exhaust hole that exhausts air in the first region and the second region through said exhaust hole;
- a shutter member that closes up a space between a periphery of said first region and said exhaust cover when the target object is heated.
A heating apparatus comprising:
- a heating region having a first region whereupon a target object is mounted and heated;
- an exhaust that exhausts air in said first region, a second region surrounding the first region, and the first region and the second region at the same time;
- wherein the first region and the second region are exhausted even when said target object is not heated;
- and
- wherein the diameter of the opening in the first region differs from the diameter of the opening in the second region.
A heating apparatus comprising:
- a heating region having a first region whereupon a target object is mounted and heated;
- a second region surrounding said first region;
- an exhaust connected to said first and second region that exhausts air in said first region, said second region, and the first region and the second region at the same time;
- wherein the first region and the second region are exhausted even when said target object is not heated;
- and
- wherein the diameter of the opening in the first region is smaller than the diameter of the opening in the second region.
Dependencies are inferred from the claim text.